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| Preventive Maintenance Modeling of Cluster Tools for Fabrication Wafers Based on Markov Chain |
| ZHOU Bing-hai, HE Ping, PAN Er-shun, XI Li-feng |
| (School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China) |
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Abstract To improve the running reliability of cluster tools for fabrication wafers, and to reduce maintenance cost efficiently, a Markov chainbased modeling method for preventive maintenance was proposed. According to the characteristics of the cluster tools, five states are defined, such as the running state, preventive maintenance (PM) state, PM unrestore state, preventive repair (PR) state and PR unrestore state. A state transition model was built with the five states. On the basis of the proposed model, an expected preventive maintenance cost model was presented. Finally, the built model was tested with simulative experiment data. The results indicate that the Markov chainbased preventive maintenance model is valid for analyzing the expected maintenance cost rate per unit time according to different combinations of modeling parameters.
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Received: 21 November 2007
Published: 28 October 2008
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Corresponding Authors:
ZHOU Bing-hai
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