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| Preparation and Nanotribological Behavior of APTES/Rareearth Composite Film |
| YANG Qianqian，CHENG Xianhua，QI Yong |
| （School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China） |
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Abstract APTES/rareearth composite film was fabricated on the singlecrystal silicon substrate by molecular selfassembly process. The structure of the composite films was characterized using ellipsometer, contact angle tester and Xray photoelectron spectroscopy (XPS).The adhesion and nanofriction properties of the composite films were investigated using atomic force microscope (AFM). The results indicate that APTES/RE film possesses a remarkable low friction coefficient and adhesion. Along with the increase of the scanning rate and load, the friction force between the probe and the film increases. The friction force and adhesion force increase with relative humidity increasing. APTES/RE composite film shows excellent antiadhesion property and wearresistance characteristic, indicating its promising applications in microelectromechanical system (MEMS) field.
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Received: 28 September 2009
Published: 29 April 2010
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