Abstract A micro flow sensor integrated inside the flow channel was manufactured by using SU8 as the flow channel which integrated electrodes inside and packaged through the bonding between SU8 and PDMS（polydimethylsiloxane）. According to the calorimetric theory, comsol, a multiphysics simulation and analysis software, was implemented to build the model of thermal micro flow sensor to analyze the key factors’ influences on its sensitivity. Then a micro flow sensor was designed and manufactured with MEMS technology. Finally, the flowvoltage testing of the micro flow sensor was executed.
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Received: 18 March 2010
Published: 30 November 2010
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