|
|
|
| Study on Rheological Mechanism of Polymer Used in Nano-imprint Lithography |
| LIU Rui-Hong, LI Hai-Hua, WANG Qing-Kang |
| (National Key Lab．of Micro／Nano Fabrication Technology，Key Lab．for Thin Film and Micro Fabrication Technology of Ministry of Education，Research Institute of Micro／Nano Science and Technology，Shanghai Jiaotong University， Shanghai 200240， China) |
|
|
|
|
Abstract The photoresist filling process was simulated by using the finite element software in the UV nanoimprint processing. According to the photoresist’s characteristics of small coefficient, a viscous fluid model which is based on fluid—solid—interaction (FSI) method through ALE (Arbitrary Lagrange Euler) algorithm was established in this simulation. The elements which affect the photoresist filling process were analyzed systematically, such as the periodic of the template, the fill factor, the aspect ratio and the nonperiodic structure template. The result shows that, comparing with the nonperiodic structure template, the periodic template will bring less deficiency. The change of the fill factor and the aspect ratio at the lower periodic template enjoys bigger effect than the larger one. The nanoimprint experiments were carried and the results match well with the simulation, which indicates the simulation’s reliability and can be used as basis for template design and surface treatment process.
|
|
Received: 29 April 2011
Published: 28 June 2012
|
|
|
|
|
|
| [1] |
JIANG Dong-Dong, HONG Fang-Jun, ZHENG Ping. Droplet Oscillations under AC Electrowetting[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 513-518. |
| [2] |
HUANG Xiang-Long, ZHANG Xiao-Jing, BAI Guo-Juan, XU Wu, WANG Hai. Residual Strength Analysis of Thin-Walled Structures with Multiple Site Damage Based on Crack Tip Opening Angle Method[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 519-524. |
| [3] |
LIU Yi-Peng, HU Xue-Yu, CHEN Jia-Luo, WANG Ping-Yang, DU Chao-Hui. Direct Image Correction Algorithm for PIV Measurement of Flowfield within Circular Tube[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 525-532. |
| [4] |
ZHU Han-Hao, PU Sheng-Chun, ZHANG Hai-Gang, LIU Wei, AN Xu-Dong. Verification of the Calculation of Acoustic Field with Typical Bottom Based on Parabolic Equation in Scaled Tank Experiment[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 532-537. |
| [5] |
YANG Jing-Jing-1, LIU Yong-Sheng-1, FANG Wen-Jian-1, FANG Jin-1, PENG Lin-1, YANG Zheng-Long-2, GAO Tian-1, GU Min-An-1. Design and Efficiency of Photovoltaic-Thermoelectric Power Generator with Negative Feedback Characteristic[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 550-554. |
| [6] |
LIU Chen-Yan-1, 2 , PAN Li-1, 2 , ZI Xiao-Chao-2. A Binary-String-Set-Based Algebraic Framework for Policy Composition[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 579-583. |
| [7] |
PENG Yan-Bin-1, ZHENG Zhi-Jun-1, YU Cheng-Bo-2, LI Ji-Ming-3. Automated Negotiation Decision Model Based on Classifier Fusion[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(04): 644-649. |
| [8] |
NING Xiao-Lin-1, ZHAO Yi-Fei-2, CHEN Fei-儿1. Index System and Prosperity Indices of Global Shipping Industry and Applied Research[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 417-422. |
| [9] |
KONG Xiang-Qiang-1, LIN Lin-1, LI Ying-1, ZHANG Dong-2, YANG Qian-Ming-1. Effect of Refrigerant Charge on the Performance of a Direct Expansion Solar Assisted Heat Pump Water Heater Using R410A[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 370-375. |
| [10] |
HUANG Kang, 欧Yang-Guang-Yao , AN Shi-Jie, CHANG Han-Bao. Design and Simulation Research on Double-Staggered Arranged Porous Nozzle[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 434-437. |
| [11] |
WANG Lei, GU Meng-Di. Optimal Reinsurance-Investment Strategies in a Mean-Reverting Market[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 438-443. |
| [12] |
XIONG Hao, YAN Hui-Li, ZHOU He-Ping, LIU Wu-Sheng. Real-Time Optimization Strategy of the Multi-Period Dynamic Vehicle Routing Problems[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 450-453. |
| [13] |
HONG Jiang-Tao-1, YANG Xiao-Yan-1, CHEN Jun-Fang-2. An Empirical Research on the Relationship among Knowledge Management, Knowledge Competence and Core Competence[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 444-449. |
| [14] |
LI Bin-a, JI Jian-Hua-a, b , LI Guo-Wei-a. Study on Supply Chain Robustness Index Mode Considering Profits and Risks[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(03): 484-488. |
| [15] |
XU Shi-Yin, HUANG Xiu-Chang, HUA Hong-Xing. Study on the Band Structure of Hexagonal Chiral Structures[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(02): 167-172. |
|
|
|
|
