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| Design and Fabrication of Micro Needles Array Based on UV-LIGA Technology
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| LIAO Zhe-Xun, LI Yi-Gui, ZHU Jun |
| (Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200240, China) |
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Abstract A new micro fabrication method for micro needles array was presented. The method is ultraviolet ray lithography method, that is: obtaining exposure energy distribution in the PS resist plate similar to the patterns in the LIGA (Lithograpie, Galvanoformung, Abformung) mask; and after development，PS micro needles array whose cross section shape is similar to the shape of the LIGA mask is obtained. In order to solve the problem of microneedles array with the ability of medicine carrying fabrication, a structure with fourfold fabrication in the microneedle array was designed. Using the process, the fabricated microneedles height is 400 μm and its whole chip size is about 22.18 cm2, and there are about 6 240 microneedles in this area. The experimental results show that the high quality solid microneedles array with the ability of medicine carrying can be fabricated simply by this method.
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Received: 20 February 2012
Published: 30 November 2012
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