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| Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints |
| SHI Xiao-Ming, ZHOU Bing-Hai |
| (College of Mechanical and Energy Engineering, Tongji University, Shanghai 201804, China) |
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Abstract According to characteristics of the cluster tools, a problem domain of the scheduling was supposed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi-cluster tools.
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Received: 19 March 2012
Published: 28 April 2013
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| [1] |
LI Cheng, JIANG Zhi-Bin, LI You, LI Na, GENG Na, YAO Shi-Qing, JIA Wen-You. Rule-Based Scheduling of Batch Processing Machine Applied to Semiconductor Wafer Fabrication System[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2013, 47(02): 230-235. |
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ZHENG Kai, HU Jie, PENG Ying-Hong, ZHAN Zhen-Fei, QI Jin. A Bayesian Inference Method for Model Extrapolation Together with Qualitative Knowledge[J]. J. Shanghai Jiaotong Univ.(Sci.) , 2012, 46(06): 994-998. |
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