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Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage
WEI Guangyu, GU Chaochen, YANG Shusheng, GUAN Xinping
Journal of Shanghai Jiao Tong University . 2023, (
5
): 593 -600 . DOI: 10.16183/j.cnki.jsjtu.2021.456
