Research article

Electric-field-induced quasi-phase-matched three-wave mixing in silicon-based superlattice-on-insulator integrated circuits

  • Richard Soref (Life Fellow IEEE) 1, * ,
  • Francesco De Leonardis 2
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  • 1 Engineering Department, University of Massachusetts at Boston, Boston, MA 02125 USA
  • 2 Photonics Research Group, Department of Electrical and Informa-tion Engineering, Politecnico di Bari, Via Orabona 4, Bari 70126, Italy
*E-mail: (Richard Soref)

Received date: 2022-12-10

  Accepted date: 2023-02-23

  Online published: 2024-08-31

Abstract

We present a theoretical investigation, based on the tight-binding Hamiltonian, of efficient electric-field-induced three-waves mixing (EFIM) in an undoped lattice-matched short-period superlattice (SL) that integrates quasi-phase-matched (QPM) SL straight waveguides and SL racetrack resonators on an opto-electronic chip. Periodically reversed DC voltage is applied to electrode segments on each side of the strip waveguide. The spectra of χxxxx(3) and of the linear susceptibility have been simulated as a function of the number of the atomic monolayers for “non-relaxed” heterointerfaces, and by considering all the transitions between valence and conduction bands. The large obtained values ofχxxxx(3) make the (ZnS)3/(Si2)3 short-period SL a good candidate for realizing large effective second-order nonlinearity, enabling future high-performance of the SLOI PICs and OEICs in the 1000-nm and 2000-nm wavelengths ranges. We have made detailed calculations of the efficiency of second-harmonic generation and of the performances of the optical parametric oscillator (OPO). The results indicate that the (ZnS)N/(Si2)M QPM is competitive with present PPLN technologies and is practical for classical and quantum applications.

Cite this article

Richard Soref (Life Fellow IEEE) , Francesco De Leonardis . Electric-field-induced quasi-phase-matched three-wave mixing in silicon-based superlattice-on-insulator integrated circuits[J]. Chip, 2023 , 2(2) : 100042 -10 . DOI: 10.1016/j.chip.2023.100042

INTRODUCTION

The superlattice-on-insulator wafer-, such as the 300-mm silicon wafer-, is presently a theoretical-physics vision that promises high performance in several opto-electronics areas1. Formed by wafer bonding, this heterogeneously integrated wafer would be diced into chips offering uniquely capable photonic and opto-electronic integrated circuits (PICs and OEICs). Our theoretical analysis indicates that the chips will have strong Pockels effect, large optical nonlinearities, and large electric-field-induced three-wave mixing, EFIM, which is the topic of this paper.
In principle, the wafer-scale short-period superlattice stacks can be engineered to give high performance chips by (1) the choice of the undoped lattice-matched semiconductors A and B that comprise the superlattice, (2) the choice of crystallographic growth direction, such as [111], (3) the choice of the atomic-monolayers numbers N and M used to create the superlattice stack, (4) the choice of transverse electric (TE) or transverse magnetic (TM) polarization of modes traveling in the superlattice waveguides, (5) the direction of the applied d.c. electric field E(dc) in the present EFIM focus, and (6) the choice of the wavelength-of-operation λ in relation to the superlattice band-gap wavelength λg at which band-to-band absorption of photons begins to occur, assuming λ>λg for low-loss superlattice waveguiding. The buried oxide in the superlattice-on-insulator platform assures high index-contrast waveguiding. The SLOI wafer is believed to be compatible with high-volume manufacture in a CMOS foundry.
We have identified GaP/Si, AlP/Si, ZnS/Si, GaAs/Ge, ZnSe/Ge, AlAs/Ge, and AlN/3C-SiC as the key platforms. Speaking generally, all seven of these possess large or very large second-order and third-order nonlinear optical susceptibilities χ ( 2 ) and χ χ ( 3 ) . However, the inherent χ ( 2 ) by itself does not ensure phase-matching of waves in a three-wave mixing process, and because of that, we are focusing instead in this paper on the inherent χ ( 3 ) of the superlattice, on the ideas that we can convert this χ ( 3 ) into a highly effective χ ( 2 ) by means of properly chosen E ( d c ) direction, and that we can obtain at the same time high-efficiency phase matching of three waves using our new periodically reversed applied voltage (PRAV) technique applied to a straight or a racetrack SL strip waveguide. Numerical simulations of this PRAV quasi-phase matching (QPM) are presented here.
Practical applications of this EFIM are projected for both classical and quantum photonics, such as classical second-harmonic generation EFISHG and quantum frequency conversion QFC. The spectral translation of a quantum state of light plays a crucial role in enabling photonic interconnects in quantum networks2. The development of quantum chips will be boosted by efficient difference-frequency generation DFG and by efficient optical parametric oscillation OPO, which are frequency down-conversion processes. These integrated-chip applications will also be enabled by sum-frequency generation SFG, such as second-harmonic generation SHG. Our PRAV QPM is projected to provide such DFG, OPO, SFG and SHG.
There is considerable prior art in the photonics literature on E-field-induced and poling-induced χ(2) effects in Si, SiO2, Si3N4, glass fiber, polymer, BaTiO3 and LiNbO33-20. However, for years, the periodically poled lithium niobate photonics platform, PPLN, has been the acknowledged leader in QPM frequency conversion. In the studies given here, we make comparisons of the SL PRAV to the present PPLN art, and we conclude that superlattice performance for the “representative” ZnS/Si stack will be comparable to, or competitive with, the PPLN performance in SHG and OPO.
It is worth repeating that the work here provides theoretical guidelines on performance expected if the layering within superlattice waveguides is nearly perfect. Of course, in developmental experiments, there will be fabrication errors including surface roughness, etching errors, variation in layer thicknesses, point defects, threading dislocations and perhaps unwanted strain as well as unintentional doping. Such errors will induce propagation loss within the passive SLOI waveguides and will decrease the performance metrics for the SLOI EFIM devices.
The paper is organized as follows. Motivations for realizing PICs and OEICs based on SLOI are detailed in Section II. Numerical results about the EFIM processes are detailed in Section III. Efficient SHG, and OPO features are found, and they are deployed to demonstrate the potential of the proposed platform. Finally, Section IV summarizes the work.

ELECTRIC-FIELD-INDUCED MIXING IN PHOTONIC INTEGRATED CHIPS BASED UPON THE SHORT-PERIOD SUPERLATTICE

The thesis here is that a PIC-based ( A ) N / ( B ) M short-period superlattice SPSL will enable a novel and efficient three-wave mixing process. Indeed, the large predicted χ ( 2 ) and χ ( 3 ) susceptibilities make this platform a good candidate for both classical and quantum applications, where optical frequency conversion plays a key role. In this context, we recently quantified that the ( A ) N / ( B ) M SPSL system can realize giant χ z z z ( 2 ) susceptibility. First, we proposed in21 a GaP/Si multi-period stack of two doped asymmetric coupled quantum wells (ACQWs), where giant values of χ z z z ( 2 ) are induced by the combination of the dopant surface density and by the double resonance condition obtained via engineering the first three quantum-confined states. Next, we explored the feasibility of realizing giant χ z z z ( 2 ) susceptibility in n-doped22 and undoped5 ( GaP ) N / ( S i 2 ) M SPSLs, where the coefficient χ i j k ( 2 ) ( 2 ω , ω , ω ) was calculated considering the electron transitions inside the conduction band, and between the valence band (VB) and the conduction band (CB), respectively. Moreover, large Kerr refractive index n2 has been calculated in23 for the ( GaP ) N / ( S i 2 ) M platform, enabling the possibility of realizing efficient entangled-photon sources based upon Spontaneous four-wave mixing. Starting from these works, we have, further theoretically demonstrated large Pockels effects in ( GaP ) N / ( S i 2 ) M , ( AlP ) N / ( S i 2 ) M , ( ZnS ) N / ( S i 2 ) M , ( AlN ) N / ( 3 C SiC ) M , ( GaAs ) N / ( G e 2 ) M , ( ZnSe ) N / ( GaAs ) M , and ( ZnSe ) N / ( G e 2 ) M SPSL structures24. As a result, SLOI circuits based upon 1×1 MZIs, micro-ring resonators and 2×2 MZIs, have been designed to offer a very favorable combination of monolithic construction, cost-effective manufacturability, high modulation/switching speed, high information bandwidth, tiny footprint, low energy per bit, low switching voltage, near-IR-and-telecom wavelength coverage, and push-pull operation.
Because of the large SPSL susceptibilities χ(3) that were found, we expect to find large EFIM effects generally in SPSL structures. We can quantify the way in which efficient three-wave mixing is actualized from a material having χ(3). Assuming an applied DC E-field and optical mode E-fields along the x-direction, the x-component of the SPSL nonlinear polarization vector P is given by25:
P ( N L ) = 3 ε 0 χ ( 3 ) ( ω ; ω , 0 , 0 ) E ( d c ) , x 2 E x ( ω ) + 3 ε 0 χ ( 3 ) ( 2 ω ; ω , ω , 0 ) E ( d c ) , x E x 2 ( ω ) + 63 ε 0 χ ( 3 ) ( ω 1 , ± ω 2 ; ω 1 , ± ω 2 , 0 ) E ( d c ) , x E x ( ω 1 ) E x ( * ) ( ω 2 )
The first and the second terms on the right side of Eq. (1) represent the DC Kerr effect and SHG, respectively. Moreover, in the last term, E x ( ω 2 ) or E x * ( ω 2 ) (the complex conjugate) is taken into account for the Sum Frequency Generation (SFG: ω 1 , + ω 2 ) or for the Difference Frequency Generation (DFG: ω 1 , ω 2 ), respectively.
Among the seven SPSL platforms that we have considered in24, we select here only those based on silicon, namely GaP/Si, AlP/Si and ZnS/Si, a selection that facilitates 300-mm-diameter platforms. We focus our numerical investigations on ( ZnS ) N / ( S i 2 ) M due to its relatively χ ( 3 ) . Even if our calculations record that ( AlP ) N / ( S i 2 ) M presents values of χ(3) almost the same as for ZnS/Si, and gives χ ( 3 ) that is 5.4 times larger than of ( GaP ) N / ( S i 2 ) M , (where GaP/Si is nonetheless a valid EFIM platform), the main reason we select ( ZnS ) N / ( S i 2 ) M is that the SL effective VB-CB bandgap is "large" and is larger than that for ( AlP ) N / ( S i 2 ) M . In addition, ZnS presents a reduced lattice mismatch to Si compared to AlP. However, it is worth outlining that the particular SPSL- materials area spotlighted here is a speculative area of research. Theory awaits experiment. MBE experiments have not yet been performed, referring to laboratory experiments that prove that any of these seven superlattices can be fabricated with high crystalline quality for the 300 to 500 layers of the stack.
In this context, several papers have been presented in literature exploring experimentally the properties of the ZnS-Si heterointerface26-28. These works can be considered as precursors for the future development of SLOI platforms based on ( ZnS ) N / ( S i 2 ) M , and for this reason, they have been adopted here to better set the valence band offset parameter in our tight-binding (TB) calculations. As mentioned in the Methods section, below, we employed the experimental ZnS/Si band offset value in our TB simulations.
To take advantage of the induced χ ( 2 ) , we are proposing in Fig. 1 lateral- E ( d c ) structures with segmented electrode pairs that straddle the strip waveguide. The cross-section of the SPSL waveguide (clad above and below by silicon dioxide) and the geometrical parameters are sketched in Fig. 1a, where the SPSL represents the ( ZnS ) N / ( S i 2 ) M SL platform. In addition, Fig. 1b shows our proposal of the Quasi-Phase-Matched (QPM) spatially periodic patterning of the electrodes, and the reversed-polarity voltages. These are adopted in order to induce very efficient EFIM processes in straight waveguides. The above-described waveguide also represents one of the two straight sections of length L in a racetrack resonator (see Fig. 1c), supporting resonances across a broad range of wavelengths, providing the needed momentum conservation and enabling the use of the same fundamental transverse electric (TE) spatial mode at all the wavelengths involved in the resonant EFIM process. Fig. 1d shows the 3D simulation of the electric DC field for the periodic patterning of the PRAV electrodes, demonstrating clearly the possibility of realizing the QPM condition. Moreover, the results obtained are in agreement with the simulations proposed in20, where alternating polarity has been used in order to induce Quasi-Phase-Matching in hollow-core photonic crystal fiber.
Fig. 1. Integrated photonic devices for the EFIM process. a, Cross-section view of our proposed SiO2-cladded ZnS/Si SPSL strip waveguide. b, Top view of a EFIM device with straight SPSL strip waveguide and quasi-phase-matched (QPM) spatially periodic patterning of the PRAV electrodes. Dimensions are not to scale. c, Top view of the bus-coupled racetrack cavity used as platform for the resonant EFIM processes (SFG, SHG, DFG, OPO). Pump light is injected through an evanescent-wave directional coupler on the bottom and undergoes nonlinear interaction in the top PRAV-QPM section. d, 3D simulation of the electric DC field for the periodic patterning of the PRAV electrodes. In the figure, the spatial distribution of the x-component of the DC electric field is plotted in the xy slice for the z coordinate placed in the middle of the SPSL waveguide. The simulation shows clearly the periodic pattern of the x-component of the DC electric field inside the core waveguide, inducing a similar behavior to that observed in PPLN.

NUMERICAL RESULTS

In this section, we present the numerical results on the EFIM processes induced in the waveguided device architectures sketched in Fig. 1. We have determined the bandgap wavelength as 845 nm, 904 nm, and 959 nm for (ZnS)3/(Si2)3, (ZnS)2/(Si2)4, and (ZnS)1/(Si2)5, respectively, with low loss at wavelengths above λg. Due to the increasing interest recently demonstrated in fiber-optical telecommunications links working around 2 µm29, hereafter, we shall consider the fundamental harmonic (FH) band around 2 µm, inducing the second harmonic (SH) band around 1 µm. Under this scenario, we have performed the χ x x x x ( 3 ) calculations at 2 µm (see Methods section) for ( ZnS ) N / ( S i 2 ) M SPSLs and for all combinations of N and M satisfying the condition N+M=3 and N+M=6.
The larger χ x x x x ( 3 ) values recorded are 4.63×10−18 m2/V2, 3.89×10−18 m2/V2 and 2.66×10−18 m2/V2 for ( ZnS ) 3 / ( S i 2 ) 3 , ( ZnS ) 1 / ( S i 2 ) 5 and ( ZnS ) 2 / ( S i 2 ) 4 . Taking the largest χ x x x x ( 3 ) , we will consider the ( ZnS ) 3 / ( S i 2 ) 3 SPSL structure to achieve efficient EFIM. In this context, the induced second-order nonlinear susceptibility is related to the third-order nonlinear susceptibility by χ e f f ( 2 ) = 3 χ x x x x ( 3 ) E ( d c ) , x , where the DC electric field, E ( d c ) , x , is shown in Fig. 1d, for an applied voltage of 20 V. The optical properties of the fundamental TE modes are summarized in Fig. 2b-d, where the Mode Solver has been used to simulate the effective refractive index, electrode-induced loss coefficient (αel, originated by the overlap between the optical mode and the electrodes), the group velocity (vg), and the waveguide dispersion parameter (D) as a function of the wavelength.
Fig. 2. The optical properties of the fundamental TE modes. a, Electric field, x-component as a function of the distance along the y-direction of Fig. 1a above. The maximum value of the electric field changes depending on the x-coordinate. b, Effective refractive index as a function of the wavelength for the TE mode. In the simulations, we have assumed G=950 nm, W=900 nm, H=700 nm and ( ZnS ) 3 / ( S i 2 ) 3 The insets show the optical TE mode distributions at wavelengths of 1000 nm and 2000 nm. c, Electrode-induced loss coefficient versus the wavelength, for different values of the electrode gap G. d, Group velocity dispersion and dispersion coefficient as a function of the wavelength.

EFIM processes in the QPM straight waveguide

The designed second-harmonic waveguide generator has W=900 nm and H=700 nm (Fig. 1a). The applied voltage ranges from 5 to 20 V. The lateral electrodes induce additional loss, depending on the gap G and the operative wavelength. According to the Fig. 2c, αel is negligible at the SH wavelength (λSH=1 µm) and ranges between 1.125 dB/cm and 0.53 dB/cm for G ranging from 850 to 950 nm at the FH wavelength (λFH=2 µm). Due to both its geometry and SPSL dispersion (Methods section), the dispersion of the waveguide introduces a phase mismatch proportional to Δ n e f f = n e f f , F H n e f f , S H , where n e f f , F H and n e f f , S H (Fig. 2b) are the effective refractive indices of the fundamental and second harmonic TE modes. Fundamental modes achieve maximal confinement in the SPSL core, and a large overlap between pump (FH) and second-harmonic signals. To achieve maximum efficient nonlinear interactions, we compensate for the phase mismatch by means of the periodic electrode pattern (see Fig. 1b), with a period Λ = λ S H / | Δ n e f f | .
The generated second-harmonic power PSH for a quasi-phase-matched nonlinear medium was derived using nonlinear coupled-mode theory and the undepleted-pump approximation in25:
P S H = | C 1 | 2 ω S H 2 f 112 2 8 ε 0 c 0 3 n e f f , F H 2 n e f f , S H P p 2 L Q P M 2 l ( α )
where C1 is the first order Fourier coefficient of the periodic electrode pattern. Moreover, the terms f112 and l(α) represent the overlap integral30 and the losses-induced factor31:
f 112 = χ e f f ( 2 ) E F H 2 E S H d x d z | E F H | 2 d x d z | E F H | 2 d x d z | E S H | 2 d x d z
l ( α ) = e L Q P M 2 ( 2 α F H + α S H ) s i n h 2 [ L Q P M ( 2 α F H α S H ) / 4 ] [ L Q P M ( 2 α F H α S H ) / 4 ] 2
where EFH (ESH) and αFH (αSH) are the optical field distribution and the overall power loss coefficient for the FH pump and (SH), respectively. We assume that each of the above-mentioned loss coefficients is given by two contributions: the propagation loss coefficient ( α p r o p ) depending on the fabrication imperfections and the electrode-induced loss coefficient αel. According to the curves shown in Fig. 2c, we set G = 950 nm as a trade-off between two conflicting requirements: larger E ( d c ) , x inside the core waveguide (corresponding to smaller G) and lower αel (corresponding to larger G). In this context, Fig. 3a shows the generated SH power and the conversion efficiency ( η = P S H / P p 2 ) as a function of the applied voltage, assuming αprop = 1 dB/cm and the input pump power of 25 mW. The plot indicates that a generated SH power of 0.044 mW and η = 7.1%/W can be obtained for an applied voltage of 20 V (corresponding to E(dc),x = 4.22 V/µm into the core waveguide). Under this scenario, the estimated χ e f f ( 2 ) is of 58.67 pm/V. Moreover, the metrics can be improved by increasing the input pump power, as shown in Fig. 3b. If we take silicon EFISHG30,31 as a reference for comparison, we find that the SL performances recorded in this work are competitive with the silicon EFISHG values presented in31, where values of χ e f f ( 2 ) = 41 pm/V and η ranging between 0.9%/W and 12 %/W have been obtained.
Fig. 3. Second harmonic generation in QPM waveguides. a, Generated SH power and conversion efficiency as a function of the applied voltage. In the simulations, we have assumed the QPM section length of 0.5 mm and the input pump power of 25 mW. b, Generated SH power as a function of the input pump power, both axes are in logarithmic scale. The QPM section length of 0.5 mm and the applied voltage of 20 V have been assumed, respectively. In the simulations, we have assumed G = 950 nm, W = 900 nm, H = 700 nm and ( ( ZnS ) 3 / ( S i 2 ) 3 .
Besides the direct χ ( 2 ) process discussed above, a cascaded χ ( 2 ) : χ ( 2 ) process is often of particular interest. In a cascaded χ ( 2 ) : χ ( 2 ) process such as a cascaded SHG/DFG, both pump and signal waves are within the same band. The pump wave at ω F H is converted to frequency ω S H by SHG. Simultaneously, the generated ωSHserves as pump wave, and is mixed with the input signal ω s to generate a wavelength-shifted ω i = ω S H by DFG. By applying the nonlinear coupled mode theory, the undepleted-pump approximation and assuming λ F H = 2 µm, λ S = 1.986 µm, α p r o p = 1 dB/cm, the input pump power of 100 mW, and the QPM section length of 2 mm, the idler wave at 2.014 µm is generated with an efficiency η = P i / P s of 0.36%.

Electric-field-induced second harmonic generation in the racetrack resonator

In this subsection, we characterize the electric-induced second harmonic generation into the racetrack resonator. The expected large intrinsic quality factor, Qi, dramatically enhances nonlinear processes by increasing the lifetimes of the interacting photons. With reference to the architecture sketched in Fig. 1c, in the following analysis, we assume the curved section having a fixed curvature radius of 300 µm and the straight section length L ranging between from 1.2 mm to 3.2 mm. By assuming α p r o p = 1 dB/cm and α e l ( T H ) = 0.53 dB/cm, the calculated intrinsic quality factors are Q i ( F H ) = 2.64×105 and Q i ( S H ) = 6.35×105, respectively. We calculate the theoretical relationship between the pump power and SHG power by numerically solving the following equation (see the METHODS section):
κ T H ( c ) | F 0 | 2 [ 1 4 κ S H 2 + ( 2 δ θ ) 2 ] = [ ( 2 | g 0 | 2 | A ˜ T H | 2 δ ( 2 δ θ ) + 1 4 κ S H κ T H ) 2 + ( δ 1 2 κ S H + ( 2 δ θ ) 1 2 κ T H ) 2 ] | A ˜ T H | 2
B ˜ 0 = j g 0 * A ˜ T H 2 j ( 2 δ θ ) 1 2 κ S H
where | A ˜ T H | 2 and | B ˜ 0 | 2 represent the photon numbers for the TH and SH optical modes inside the cavity, respectively. The term κi (i=TH,SH) is the overall photon decay rate, taking into account the overall losses and the coupling between the racetrack and the external bus waveguide. The coupling rate cavity/bus ( κ i ( c ) ; i = T H , S H ) is calculated as a function of the coupling factor ( k i ( 2 ) ) as κ i ( c ) = k i ( 2 ) v g , i / L c a v , where L c a v and v g , i indicate the cavity length and the group velocity (Fig. 2d), respectively. Moreover, the coefficients δ and θ are defined as the driving and modal detuning, respectively and given by: δ = ω ω 0 and θ = Ω 0 2 ω 0 , where ω is the angular frequency of the input pump beam and ω 0 and Ω 0 are the resonance angular frequency of the fundamental and second harmonic bands. Finally, | F 0 | 2 = P i n / ω (Pin: the input pump power) is the driving source and g 0 is the nonlinear strength coefficient defined in the Methods section.
Our simulations indicate that the free spectral range (FSR) of the device is F S R ( T H ) = 30.05 GHz ( F S R ( S H ) =30.83 GHz), F S R ( T H ) = 20.48 GHz ( F S R ( S H ) = 21.02 GHz) and F S R ( T H ) = 15.54 GHz ( F S R ( S H ) = 15.95 GHz), for L of 1.2 mm, 2.2 mm and 3.2 mm, respectively. According to the experimental setup proposed in32. temperature tuning can be used in order to realize a fine control over the modal detuning θ. Moreover, the obtained FSR values allow us to set the desired θ by means of small temperature change around the room temperature. In this sense, we assume zero modal detuning and the input laser source matched to ω 0 : λ 0 = 2000.175 nm, λ 0 = 2000.461 nm and λ 0 = 2000.403 nm, for L of 1.2 mm, 2.2 mm and 3.2 mm, respectively.
Fig. 4 shows the nonlinear strength coefficient as a function of the applied voltage, for different values of the electrode gap G. The curves indicate that the values at 20 V are larger than the values calculated in14 for the LNOI platform. In Fig. 5, the color map of the SH power at the output of the bus waveguide, P o u t ( S H ) = κ S H ( c ) | A ˜ S H | 2 Ω 0 , is shown in the plane ( k S H ( 2 ) , k T H ( 2 ) , k S H ( 2 ) , k T H ( 2 ) ), for different values of the QPM section length (L) and of the propagation loss coefficient ( α p r o p ) and assuming the applied voltage of 20 V, and the input pump power of 500 µW.
Fig. 4. Nonlinear strength coefficient as a function of the applied voltage, for different values of the G parameter. In the simulations, we have assumed W = 900 nm, H = 700 nm and ( ZnS ) 3 / ( S i 2 ) 3 .
Fig. 5. SH output power in µW as a function of pump and SH power coupling factors. In the plot, the rows are for αprop = 0.5 dB/cm, 1 dB/cm, 2 dB/cm. The columns are for L = 1.2 mm, 2.2 mm, 3.2 mm. In the simulations we have assumed: Pin = 500 µW, W = 900 nm, H = 700 nm, Va = 20 V and ( ZnS ) 3 / ( S i 2 ) 3 .
The analysis of the SH output power as a function of pump and SH coupling factors allows us to find important design guidelines for the guided-wave directional coupler (DC) between the racetrack resonator and the bus waveguide. Indeed, once the waveguide cross section has been selected in order to induce large nonlinear interaction (large g0), any shape and architecture of the DC can be practically designed, with the only requirement being that the pair ( k S H ( 2 ) , k F H ( 2 ) , k S H ( 2 ) , k F H ( 2 ) ) is chosen in order to achieve specific SH performance. Generally speaking, the plots of Fig. 5 indicate that the overcoupling conditions for both pump and SH waves must to be satisfied in order to maximize the SH output power. For example assuming L of 3.2 mm and α p r o p =1 dB/cm, we record that the coupling factors under the critical coupling condition are kSH,crit(2) = 18.6% and kFH,crit(2) = 23%, while the peak of Pout(SH) is generated for k S H ( 2 ) = 30.2% and k F H ( 2 ) = 30.6%,
Finally, an increase in the conversion efficiency is obtained for larger values of the input pump power, as evidenced in Fig. 6, where P o u t ( S H ) and η = P o u t ( S H ) / P i n are plotted as a function of Pin.
Fig. 6. SH output power and conversion efficiency as a function of the input pump power, for different values of the QPM section length. In the simulations we have assumed: G = 950 nm, W = 900 nm, H = 700 nm, Va = 20 V, ( ZnS ) 3 / ( S i 2 ) 3 , α p r o p = 1 dB/cm, k S H ( 2 ) = 22% and k T H ( 2 ) = 17.55% for L = 2.2 mm, and k S H ( 2 ) = 23% and k T H ( 2 ) = 25.6% for L = 3.2 mm.
Although the SLOI platform records larger propagation losses than does the LNOI, our numerical results indicate that the electric-field-induced second harmonic generation is competitive in terms of SH generated power and conversion efficiency with respect to the LNOI values proposed in32. Indeed, the larger value of the nonlinear strength coefficient (Fig. 4) allows us to partially compensate for the reduced Qi-induced enhancement that our SLOI platforms suffer compared to LNOI.

Spontaneous parametric down-converted on-chip quantum-photonic sources

Our preliminary calculations show that our EFIM process applies very well to creating on-chip sources of entangled photons for quantum-photonic PICs. The DFG approach is used here, and the case of spontaneous parametric down-conversion SPDC is predicted to be feasible. A specific example of this is the overlap of our EFIM with the quantum-sourcing presented in23 where the inherent χ ( 2 ) aspect of GaP/Si SL was exploited to form bus-coupled micro ring resonators MRRs that created entangled photons in Fig. 1a of23. If we now substitute our bus-coupled PRAV racetrack resonators of Fig. 1c for the bus-coupled MRRs in the23 Figure, then our EFIM DFG will assure the same entangled-photon sourcing.
Going into more detail, we note that the SPDC is proportional to the coupling coefficient |g0|2, and that |g0|2 is large in the EFIM case due to large χ(3) and to large overlap of the fundamental modes. Below the OPO threshold, the total SDPC photon-pair generation rate R is proportional to the product of | g 0 | 2 and the input pump power. For the degenerate SPDC, the total photon generation rate (R) is given by: R = 16 P i n | g 0 | 2 κ B ( c ) / Ω κ A κ B 2 . Therefore, | g 0 | 2 is the figure of merit to optimize the SPDC device performance.
Having outlined this SPDC application, we now turn to the related down-conversion application- which is OPO.

Electric-field-induced optical parametric oscillator in the racetrack resonator

In this subsection, we present numerical results on the electric-field-induced Optical Parametric Oscillator (OPO). This oscillation has a threshold, as does a laser, and that is why it differs from the thresholdless SPDC where the vacuum noise plays great role to induce the spontaneous photon pair generation. In the following analysis we refer to the architecture of Fig. 1c. In this context, we study the OPO by driving the device with a pump laser at around 1000 nm (SH band) and then attaining the generated light at close to twice the wavelength (FH band). According to the mathematical model summarized in the Method section, the dynamics of the system are described by a set of coupled-mode equations for the variables A ˜ m and A ˜ n (field amplitudes in the FH band) and second harmonic B ˜ 0 (field amplitude in the SH band).
Thus, the χ e f f ( 2 ) optical nonlinearity of the SPSL structure induces two FH resonances at ω m and ω n and the SH resonance at Ω 0 to interact with each other by means of the nonlinear strength coupling g 0 , m n . Moreover, the FH-mode angular frequencies can be expressed as a function of ω0, the group velocity and the dispersion parameter, D, (Fig. 2d) as: ω l = ω 0 + l × 2 π v g , F H / L c a v + 0.5 × l 2 × ξ , where l = m , n and ξ = π v g , T H 3 D λ 0 2 / ( c 0 L c a v 2 ) . Thus, the Fig. 1c device can operate either as a degenerate OPO with emission at the ω 0 mode, or as a nondegenerate OPO emitting in a pair of FH modes m and n=−m, where these mode frequencies are given by ω m = ω 0 + m × 2 π v g , F H / L c a v + 0.5 × m 2 × ξ and ω m = ω 0 m × 2 π v g , F H / L c a v + 0.5 × m 2 × ξ . Under the stationary regime, the amplitudes A˜m and A˜−m are given by:
| A ˜ m | 2 = 4 × K | g 0 , m m | 2 [ 1 4 κ A , m κ B Δ ( Δ + δ 0 , m m 2 ) ] + Γ m 8 × K 2 | g 0 , m m | 4 [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ]
| A ˜ m A ˜ m * | 2 = | A ˜ m A ˜ m | 2 = [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ]
where
Γ m = 16 × K 2 | g 0 , m m | 4 [ 1 4 κ A , m κ B Δ ( Δ + δ 0 , m m 2 ) ] 2 16 × K 2 | g 0 , m m | 4 [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] ( 4 | g 0 , m m | 2 κ B ( c ) | G 0 | 2 ) 16 × K 2 | g 0 , m m | 4 [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ B ) 2 + ( Δ ) 2 ]
In Eqs. (7)-(9) the degeneracy factor, K, is defined in the Methods section, and Δ = Ω Ω 0 with δ 0 , m m = Ω 0 ω m ω m . Moreover, the OPO device is driven by a laser source that is characterized by | G 0 | 2 = P i n / Ω , where Ω is the laser angular frequency.
By setting | A ˜ m | 2 we obtain the following threshold condition:
P i n , t h = Ω ( 4 | g 0 , m m | 2 κ B ( c ) ) [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ A , m ) 2 + ( Δ + δ 0 , m m 2 ) 2 ] [ ( 1 2 κ B ) 2 + ( Δ ) 2 ]
From Eq. (10), we observe that the OPO will oscillate first in the mode m for which Δ + δ 0 , m m , where P i n , t h is the lowest. If we assume the driving detuning Δ = 0, the oscillating mode must be satisfying the condition: δ 0 , m m , where m is an integer. Thus, temperature tuning of the modal detuning θ allows us to select the OPO operation regime. In particular, we achieve degenerate or nondegenerate operation for θ values close to zero or negative, respectively. It is worth outlining that the negative value of θ depends on the negative value of ξ in the FH band, as induced by the dispersion parameter D (Fig. 2d).
In Fig. 7a, we show the level curves (mW) of the input threshold power for the degenerate OPO regime as a function of the pump and OPO signal coupling factors. Moreover, Fig. 7b plots the degenerate OPO output power as a function of the input pump power, for different combinations of the coupling factors. In the simulations, the OPO output power is calculated as: P o u t ( O P O ) = κ m ( c ) | A ˜ m | 2 ω m + κ m ( c ) | A ˜ m | 2 ω m . As can be seen from Fig. 7b, the OPO threshold and output power depend on the coupling factor for the pump and OPO wavelengths. For a given pump coupling, lower coupling for the OPO corresponds to a lower threshold, but with lower output power. In contrast, a higher coupling factor corresponds to a higher threshold and higher output power.
Fig. 7. a, Threshold power in mW for OPO degenerate operation as a function of the pump and OPO signal coupling factors. b, Degenerate OPO output power as a function of the input pump power. In the simulations we have assumed: G = 950 nm, W = 900 nm, H = 700 nm, Va = 20 V, ( ZnS ) 3 / ( S i 2 ) 3 , α p r o p = 1 dB/cm, L = 3.2 mm and Ω 0 corresponding to the wavelength 1000.188 nm
Finally, the nondegenerate OPO operation is described in Fig. 8, where the oscillating FH modes m as a function of the modal detuning are shown in Fig. 8a, while P o u t ( O P O ) versus the pump detuning (Δ) and the pump coupling factor is indicated in the 3D plot of Fig. 8b.
Fig. 8. a, OPO oscillating wavelengths as a function of the modal detuning. b, Nondegenerate OPO output power as a function of the pump detuning and the pump coupling factor. In the simulations we have assumed: G = 950 nm, W = 900 nm, H = 700 nm, Va = 20 V, ( ZnS ) 3 / ( S i 2 ) 3 , α p r o p = 1 dB/cm, L = 3.2 mm and Ω 0 corresponding to the wavelength 1000.188 nm.
We believe that the results proposed here can be adopted to realize on the SPSL platform both main parts of the QFC module detailed in33, comprised of the OPO mixer for the tunable wavelength pump laser and the SFG PPLN for the SFG process.

Field-induced- χ ( 2 ) frequency conversion compared to inherent- χ ( 2 ) conversion

The unique advantage of the present QPM can be illustrated by a comparison of two approaches to SHG via the ZnS/Si SL waveguide structures. The previous method is to engineer the SL for large inherent χ ( 2 ) for TM mode polarization, as was accomplished earlier in GaP/Si23. The method here is to engineer the TE-mode-relevant χ ( 3 ) for E-induced χ ( 2 ) and QPM. In the inherent method, a micro ring resonator is required in the SHG case because there a straight waveguide would not provide any matching of FH and SH phases, except over a small coherence length. For this inherent χ ( 2 ) case, when an MRR is deployed to attain ring-modes-matched SH conversion, we anticipate a ZnS/Si conversion efficiency (defined as η = P o u t ( S H ) / P i n 2 ) of about 10 W−1 as was found for the Gap/Si SL23. By comparison, if we examine the PRAV EFISHG results presented here above for the racetrack resonator, we find that the efficiency in this case is approximately 80 W−1. Generally, the EFIM approach gives superior frequency conversion but at the expense of an “active” length of 1 to 3 mm.

Comparison of results with prior semiconductor art

We have compared our results favorably with those of poled ferroelectric films, but it is also relevant to make a targeted comparison with the prior-art QPM of crystalline silicon waveguides discussed in31 for the SOI platform. We shall generally compare the capabilities of the SOI PIC with those of the SLOI PIC. Both PICs have multiple functionalities that can be utilized at the same time, and we call this the “photonic toolbox”, a phrase that others have coined. We are suggesting here that the SLOI toolbox is larger than that of SOI for several reasons. The superlattices, as mentioned above, have a strong Pockels-effect EO modulation response, whereas SOI does not have any Pockels modulation, and SLOI, as mentioned above has inherent χ ( 2 ) which SOI does not have. Both SLOI and SOI offer the Kerr index n2. However, the n2 is much stronger in SLOI, roughly twenty-times larger than the n2 of SOI. Regarding the wavelength coverage of QPM, the short-wave limit is around 1.1 µm for SOI as compared to 0.85 µm for the ZnS/Si SL case.
We can widen the scope of the present SL coverage by considering all of the SLs that are comprised of “cubic” semiconductors A and B for which the lattice mismatch between A and B is less than 0.8%, and where A is a III-V or II-VI or group-IV semiconductor and B is a III-V or II-VI or group-IV semiconductor. Then, we find that there are 19 short period superlattices that meet this requirement. This wide range of SL choices offers enhancements with respect to the present ZnS/Si SL in the areas of χ ( 3 ) optimization and wavelength-range-of-operation. For example, the ZnS/GaP SLOI gives QPM EFIM over the ultraviolet-and-visible range.
Because, at 20 V, the ZnS/Si 58.7 pm/V effective- χ ( 2 ) for SHG is only 43% larger than that of SOI QPM SHG, a relevant question is whether other lattice-matched SLs just mentioned possess effective χ ( 2 ) SH in the 100 pm/V range. Our answer is a tentative yes, based upon preliminary calculations. And this projected QPM applies to DFG, SPDC and OPO. Although phonon-related responses were not quantified here, we expect larger-than-Si stimulated Raman and stimulated Brillouin scattering in ZnS/Si SLs.
In the SOI platform, photodetectors (PDs) are usually not lattice matched to Si, but SLOI offers the capability of a lattice-matched PN-junction or PIN-diode PD grown monolithically as a leaky top cladding upon the SL waveguide core, using semiconductor B in the (A, B) SL. For example, in ZnS/Si, a reverse-biased silicon PN PD is fabricated epitaxially on the SL guide strip. However, the detection wavelengths are limited to 850-to-1050 nm. In addition, the same semiconductor B can be employed to create a lattice-matched LED integrated on any SL channel waveguide. This would be a forward-based silicon PN LED for the ZnS/Si case, and the emission wavelengths would be around 1050 nm. Efficient on-chip communication links would be realized utilizing LED-to-PD pairs, with highest efficiency for those SLs having direct bandgap.
For ZnS/Si SLOI, the advantages over SOI are: (1) stronger-than-Si χ ( 3 ) and n2 and 850-to-1100-nm wavelength coverage, (2) a more complete toolbox possessing large Pockels modulation, inherent χ ( 2 ) , and lattice-matched LEDs-and-PDs, and (3) monolithic PICs for these features. For selected SLs different from ZnS/Si, we project QPM EFIM performance that is 2x better than that of Si in voltage reduction and/or in interaction-length reduction. Regarding the SLOI PICs and OEICs, we expect a wide range of applications, especially in monolithic quantum-photonic chips that combine several photonic functions.

CONCLUSIONS

In this paper, a physics-and-engineering procedure has been performed in order to investigate EFIM processes in a straight waveguide, and in bus-coupled integrated racetrack-resonators based upon ( ZnS ) N / ( S i 2 ) M short-period-superlattices. In this context, general physical aspects have been investigated by means of the empirical s p 3 s * tight-binding method, by determining the features of the electronic structure and the influence of the monolayers number upon χ x x x x ( 3 ) and the SPSL refractive index dispersion. We have explored large third-order nonlinearity coefficients in undoped, unstrained multi-layered waveguided (ZnS)N/(Si2)M structures, demonstrating that the electric-field-induced second-order nonlinearity can be used to induce efficiently SHG and OPO in the wavelength range from 1000 nm to 2000 nm. Moreover, we have demonstrated that superlattices based on the [111] ( ZnS ) N / ( S i 2 ) M SL structure are suitable for realizing Quasi-Phase-Matched waveguides, operating with the fundamental TE modes for all the wavelengths involved in the EFIM process, where segmented side-electrodes that are periodically cascaded along the strip waveguide allow periodically reversed applied voltage. As a result, the maximal confinement in the SPSL core, and the large overlap between pump and second-harmonic signals, lead to increasing the conversion efficiency with respect to the case of SPSL waveguides based on large inherent χ z z z ( 2 ) ( 2 ω , ω , ω ) , where the overlap between fundamental and higher-order TM modes is required. Using the large electric-field-induced χ e f f ( 2 ) values provided by ( ZnS ) 3 / ( S i 2 ) 3 superlattices, we predict on-chip resonant SHG and OPO with performances comparable to the results experimentally found for the LNOI platform. For the above reasons, the present work offers a performance motivation for using the ( ZnS ) N / ( S i 2 ) M SL platform in future experimental heterogeneous SLOI opto-electronc PIC chips for classical and quantum applications.

METHODS

The multilayered waveguide proposed here, is a ZnS/Si short-period superlattice (SPSL). Generally speaking, the superlattice ( A ) N / ( B ) M we consider has N monolayers (MLs) of A and M monolayers of B, repeated periodically along the [111] growth direction z. Note that the single ML is comprised of a two-atom-thick layer (i.e. cation and anion). In this context hereafter, we denote with ( c a ) N / ( A ) N / ( B ) M the SL structure. All atoms are on the sites of a zinc-blende lattice with lattice constant aL (under the perfect AB-matched condition). The x and the y coordinate axes are chosen along [ 2 ¯ 1 1] and [0 1 ¯ 1]. In our investigations we assume N + M = 3 q (q=1,2,3…), for which the Bravais lattice is hexagonal and the point group is C3v.
In our approach, the Hamiltonian matrix, H(k), related to the generic ( c a ) N / ( C A ) M SLs is obtained by means of the empirical s p 3 s * tight binding (TB) method and is defined as4:
H = 1 2 3 N 1 2 3 M ( 1 2 3 . . . N 1 2 3 . . . M H c a G c a F c a 0 0 0 F 1 G 1 H c a G c a F c a 0 0 0 F 1 H c a G c a F 0 0 0 0 H c a G 0 F 0 0 0 H C A G C A F C A h . c . H C A G C A F C A H C A G C A H C A )
where the 10×10 matrices H c a ( C A ) , G c a ( C A ) and F c a ( C A ) denote intramaterial interaction for ( c a ) N and ( C A ) M , respectively. In these blocks, every element represents a 5×5 matrix taking into account the intrasite energies, as well as second and nearest neighbor interactions. Moreover, the matrices Gi and F i (i=0,1) denote the intermaterial interactions.
Within the density matrix calculation, both linear and nonlinear susceptibilities are directly dependent upon the dipole matrix elements n , k | u · r | m , k , u · n , k | r | m , k , where u is the polarization vector of the electric field and r is the vector position operator. Here n and m denote the band index, running in either VB or CB, and k indicates the wavevector. In k-space the position operator is proportional to the gradient with respect to k of the Hamiltonian H(k)4:
μ n m = n , k | r | m , k = j ( E m ( k ) E n ( k ) ) n , k | k H ( k ) | m , k
where Ei(k) represents the energy at the k point for the i-th band. It should be noted that both the Hamiltonian H(k) and the dipole matrix elements are calculated taking into account the band offset parameter (see Ref. 25 for the ( ZnS ) N / ( S i 2 ) M SL).
We first calculate the electronic structure by diagonalizing the Hamiltonian H(k) and consequently we apply Eq. (12). The calculation for both the refractive index ( χ ( 1 ) ) and the χ x x x x ( 3 ) susceptibility have been addressed by considering the transitions from VB to CB. According to the general definition given in25 (not reported here for compactness reasons), we estimate the linear and third-order susceptibility by performing a summation over all VB and CB bands and integrating in k space. In this way, the refractive index and χ x x x x ( 3 ) take into account all the effects related to band non-parabolicity and related to the momentum-dependence of the dipole matrix elements (see Eq. (12)).
The method adopted here can be functionalized to our aim, guaranteeing the possibility of fitting optimization on the basis of future experimental measurements.
In turn, the coefficient χ x x x x ( 3 ) is used for evaluating the EFIM process. Indeed, the dynamics of the EFIM system are described by the following coupled-mode equations for the fundamental ( A ˜ m ) and second harmonic ( B ˜ 0 ) field amplitudes. The terms | A ˜ m | 2 and | B ˜ 0 | 2 correspond to the intracavity photon numbers for the fundamental and second harmonic modes.
d A ˜ m d t = 1 2 κ A , m A ˜ m + j ( Δ + δ 0 , m m 2 ) A ˜ m j 2 n g 0 , n m B ˜ 0 A ˜ n * + κ A , m ( c ) F 0
d B ˜ 0 d t = 1 2 κ B B ˜ 0 + j Δ B ˜ 0 j K n , m g 0 , n m * A ˜ m A ˜ n κ B ( c ) G 0
g 0 , n m = C 1 L L c a v ω m ω n Ω 0 8 ε 0 L c a v S χ e f f ( 2 ) E S H * E m E n d S S n S H 2 | E S H | 2 d S S n m 2 | E m | 2 d S S n n 2 | E n | 2 d S
The terms nSH, nm and nn indicate the SL refractive index at Ω0, ωm and ωn, respectively. All the other parameters are defined in the main text. In the case of SHG, we set G0 = 0, F0≠ 0; ωm = ω0 and n = m. To the contrary, for OPO application: F0 = 0, G0≠ 0; n = −m. Finally in Eq. (14), the degeneration factor K = 1 or 2, for SHG or OPO, respectively.

MISCELLANEA

Author contributions The manuscript was written through contributions of all authors. All authors have given approval to the final version of the manuscript. R. S. conceived the idea, F. D. L. performed the simulations.
Acknowledgment The work of Richard Soref is supported by the Air Force Office of Scientific Research under Grant FA9550-21-1-0347.
Declaration of Competing Interest The authors declare no competing interests.
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