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空天防御  2020, Vol. 3 Issue (4): 1-7    
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低温红外场景生成技术研究
李卓1,2,时庆峰1,2,王欣1,2,高彦泽1,2,施蕊3
1.北京理工大学光电学院,北京100081;
2.精密光电测试仪器与技术北京市重点实验室,北京100081;
3.蓝视光学科技(北京)有限责任公司,北京100081
Cryogenic Infrared Scene Generation Technology
LI Zhuo1,2, SHI Qingfeng1,2, WANG Xin1,2, GAO Yanze1,2, SHI Rui3
1.School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China; 
2.Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China;
3.Lanshi Optics Technology (Beijing) Co., Ltd., Beijing 100081, China
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摘要 提出了一种基于微机电系统(micro-electro-mechanical system,MEMS)薄膜芯片的低温红外场景生成技术,芯片本身是基于光加热的被动无源器件,因此可以将场景写入系统放在低温真空舱外。在低温环境内没有电子器件和保温层的辐射干扰,无源芯片本身能模拟的最低温度可以无限接近于低温下的环境温度。建立了理论模型和实验装置,并对薄膜芯片在低温下的空间特性和时间特性进行了测试。在7.5~14μm波段,当入射到芯片处的光功率密度为0.0275W/mm2时,环境温度从233K降低到173K,可模拟温度范围从49.67K增大到85.2K。在环境温度173K下,写入光功率增加到0.1233W/mm2时,可模拟温度范围加大到367K。当环境温度从233K降低到173K时,芯片的上升时间从6.52ms增加至6.73ms,下降时间从6.75ms减少至6.22ms。低温实验结果表明:环境温度越低,芯片可模拟温度范围越大,时间响应也越快。红外薄膜在低温红外场景生成技术中拥有广阔的应用前景。
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关键词 低温红外场景生成MEMS薄膜芯片温度空间特性温度时间特性    
Abstract:This paper demonstrates a cryogenic infrared scene generation technology based on MEMS thin film transducer which based on the passive optical heating device. The scene writing system can be put outside the cryogenic vacuum chamber, without radiation interference of electronics and thermal insulation layer in the cryogenic environment, so the passive film transducer can simulate the lowest temperature to be infinitely close to the ambient temperature in low temperature environment. The theoretical model and experimental equipment are established, and the spatial and temporal properties of the thin film transducer at low temperature are tested. In 7.5~14μm waveband, when the optical power density at the incident is 0.0275W/mm2, the ambient temperature decreases from 233 K to 173 K, and the simulated temperature range increases from 49.67 K to 85.2 K. At the ambient temperature of 173 K, when the written optical power increases to 0.1233W/mm2, the simulated temperature range increases to 367K. When the ambient temperature drops from 233 K to 173 K, the rise time of the film transducer increases from 6.52 ms to 6.73 ms, and the decline time also accelerates from 6.75 ms to 6.22 ms. The low temperature experimental results show that the lower the ambient temperature is, the larger the temperature range of the film transducer can be simulated, and the faster the time response is. The experiment indicates that the infrared thin film has a broad prospect in the cryogenic infrared scene generation technology.
Key wordscryogenic infrared scene generation    MEMS film transducer    temperature spatial properties    temperature temporal properties
收稿日期: 2020-09-24      出版日期: 2020-12-28
基金资助:中国博士后科学基金第2批特别资助(站前)
作者简介: 李卓(1958—),男,博士,教授,主要研究方向为半实物仿真、光电子信息系统。
引用本文:   
李卓, 时庆峰, 王欣, 高彦泽, 施蕊. 低温红外场景生成技术研究[J]. 空天防御, 2020, 3(4): 1-7.
LI Zhuo, SHI Qingfeng, WANG Xin, GAO Yanze, SHI Rui. Cryogenic Infrared Scene Generation Technology. Air & Space Defense, 2020, 3(4): 1-7.
链接本文:  
https://www.qk.sjtu.edu.cn/ktfy/CN/      或      https://www.qk.sjtu.edu.cn/ktfy/CN/Y2020/V3/I4/1

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