Active Micro-Nano-Collaborative Bioelectronic Device for Advanced Electrophysiological Recording

doi:10.1007/s40820-024-01336-1

Abstract

Abstract:

The development of precise and sensitive electrophysiological recording platforms holds the utmost importance for research in the fields of cardiology and neuroscience. In recent years, active micro/nano-bioelectronic devices have undergone significant advancements, thereby facilitating the study of electrophysiology. The distinctive configuration and exceptional functionality of these active micro-nano-collaborative bioelectronic devices offer the potential for the recording of high-fidelity action potential signals on a large scale. In this paper, we review three-dimensional active nano-transistors and planar active micro-transistors in terms of their applications in electro-excitable cells, focusing on the evaluation of the effects of active micro/nano-bioelectronic devices on electrophysiological signals. Looking forward to the possibilities, challenges, and wide prospects of active micro-nano-devices, we expect to advance their progress to satisfy the demands of theoretical investigations and medical implementations within the domains of cardiology and neuroscience research.

Key words: Active micro/nano collaborative bioelectronic device, Three-dimensional active nano-transistor, Planar active micro-transistor, Electrophysiology

Yuting Xiang, Keda Shi, Ying Li, Jiajin Xue, Zhicheng Tong, Huiming Li, Zhongjun Li, Chong Teng, Jiaru Fang, Ning Hu. Active Micro-Nano-Collaborative Bioelectronic Device for Advanced Electrophysiological Recording[J]. Nano-Micro Letters, 2024, 16(1): 132-.

Yuting Xiang, Keda Shi, Ying Li, Jiajin Xue, Zhicheng Tong, Huiming Li, Zhongjun Li, Chong Teng, Jiaru Fang, Ning Hu. [J]. Nano-Micro Letters, 2024, 16(1): 132-.

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URL: https://www.qk.sjtu.edu.cn/nml/EN/10.1007/s40820-024-01336-1

https://www.qk.sjtu.edu.cn/nml/EN/Y2024/V16/I1/132

Figures/Tables 7

Fig. 1 a Equivalent circuit model for simulating cell/nano-transistor coupling and recording electrical signals. b Structure and c SEM images of three-dimensional nano-transistor. Scale bar, 100 nm. d Typical extracellular and intracellular action potentials recorded after contact between nano-transistor and cardiomyocytes. Reproduced with permission from [81]. Copyright 2012, American Chemical Society

Fig. 2 a Photograph of EGFET on a silicon wafer and schematic of EGFET dimensions. b Equivalent circuit diagram of the EGFET. Reproduced with permission from [43]. Copyright 2016, Springer International Publishing Group. c Sensitivity distribution ratio of 30 FETs on the same chip (left). Immunofluorescent maps of neurons cultured on FET and recorded electrical signal traces (right) [93]. Copyright 2017, Frontiers Media S.A. Publishing Group

Fig. 3 a Schematic representation of NW growth catalyzed by gold nanoclusters and the interface between short-channel NWFET-electrically excited cells [97]. Copyright 2012, American Chemical Society Publishing Group. b Nano-transistor fabrication process. FET probes were fabricated by EBL, PL, and lithography steps. Scale bar, 10 mm. Reproduced with permission from [42]. Copyright 2014, Nature Publishing Group. c Schematic diagram of the interface between the 10-FET array and cardiomyocytes (left). Multilayer structure diagram of the 10-FET array (middle). Pseudocolor SEM images from planar multilayer structures to three-dimensional structures, scale bars, 50 μm (right). Reproduced with permission from [44]. Copyright 2022, Nature Publishing Group. d The schematic diagram and SEM image of field-effect transistor nanosensor [109]. Copyright 2016, American Chemical Society Publishing Group

Fig. 4 a Schematic diagram of graphene micro-transistor and Si-FET designs. b Raman spectra correspond to graphene micro-transistor (left) and the water-gate response of a typical graphene micro-transistor (right). Reproduced with permission from [40]. Copyright 2010, American Chemical Society. c Schematic diagram of the graphene micro-transistor, with graphene located between the drain and source metal contacts (top) and the microscope image of the eight transistors in the graphene micro-transistor array (bottom). Scale bar:100 μm. d Transistor current-gate voltage curves and corresponding transconductance-gate voltage curves of eight different devices in the same micro-transistor array. Reproduced with permission from [120]. Copyright 2011, WILEY-VCH

Table 1 Comparison of nano-transistors and micro-transistors

Type	Material	Process	Type of electrical signal	Amplitude	Throughput	Application	Refs.
Nano-transistors	Si, SiO₂	VLS, EBL, ALD, photolithography	Intracellular electrical signal	60-120 mV	1-100	Electrophysiology, Drug response	[39, 41, 44, 96]
Micro-transistors	Graphene	Mechanical exfoliation, CVD	Extracellular electrical signal	< 10 mV	1-10	Implantable flexible devices	[40, 112, 135]

Fig. 5 a (i) Typical transition from extracellular to intracellular recording (conductance versus time). (ii) The magnified view inside the black dashed box in (i) (left) and the magnified view in the red dashed box (right). (iii) Microscopic images of two BIT-FET devices coupled with cardiomyocytes and corresponding electrophysiological signal recordings. Reproduced with permission from [41]. Copyright 2012, Nature Publishing Group. b (i) Schematic representation of intracellular recording of U-NWFET. (ii) Intracellular signals recorded from a primary neuron as ROC curves of 0.75 μm for a FET probe with a channel length ∼ of 50 nm. (iii) The extracellular electrical signal of HiPSC-CMs recorded from a FET with ~ 2000 nm channel length and 1.5 μm ROC (left) and the intracellular electrical signal of hiPSC-CMs recorded from a FET with ~ 50 nm channel length and 0.75 μm ROC (s). Reproduced with permission from [105]. Copyright 2019, Nature Publishing Group. c (i) Schematic of a nanoelectronic scaffold with nanowire field effect transistor arrays and a 3D folded scaffold co-cultured with cardiac tissue. (ii) Electrical signal patterns recorded by 16 sensors in a nanoelectronic scaffold [73]. Copyright 2016, Nature Publishing Group. d (i) Schematic of implanted probe in the brain. (ii) Schematic of a large hole probe and a micrograph of a typical nanowire field effect transistor. Scale bar, 5 µm. (iii) Recorded mapping with a nanowire FET sensor in the cortical region of the rat brain. Scale bar, 200 µm [74]. Copyright 2015, Macmillan Publishing Group

Fig. 6 a Schematic of a flexible GFET on a polyimide substrate (left); Fluorescence images of HL-1 cells in flexible GFET and electrophysiological signals recorded. Scale bar: 60 μm. Reproduced with permission from [119]. Copyright 2016, Institute of Physics Publishing. b (i) Photographs of cardiac tissues and recorded electrophysiological signal traces recorded by GFET. (ii) Optical micrographs and typical electrophysiological signal traces of HL-1 cells cultured on GFET. (iii) Temporal recording trajectories of neurons. Reproduced with permission from [111]. Copyright 2017, Nature Publishing Group. c Optical micrographs of neurons on a 40 µm × 250 µm graphene transistor (scale size 40 µm) and conductance-time curves recorded from multiple gates [142]. Copyright 2018, Institute of Physics Publishing Group. d (i) Optical micrographs of GFET arrays combined with microfluidics and device layout for fluidic microchannels on a transistor. (ii) Immunofluorescence image of neurons cultured on graphene transistor. (iii) Electrical signal recording profiles of neurons cultured on graphene transistors [144]. Copyright 2022, Wiley-VCH Publishing Group. e During cell signaling, extracellular electrical signals are recorded electrically or chemically [147]. Copyright 2018, Institute of Physics Publishing Group

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